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 MOTOROLA
SEMICONDUCTOR TECHNICAL DATA
Order this document by MMAS40G10D/D
Micromachined Accelerometer
40g
The MMAS40G family of silicon capacitive, micro-machined accelerometers features integral signal amplification, signal conditioning, a 4-pole low-pass filter and temperature compensation. Zero-G offset, full scale span and filter roll-off are factory set and require no external passives. A calibrated self-test feature mechanically displaces the seismic mass with the application of a digital self-test signal. The MMAS40G incorporates a single polysilicon seismic mass, suspended between two fixed polysilicon plates (G-cell). The forces of acceleration move the seismic mass, thereby resulting in a change in capacitance. The G-cell is sealed at the wafer level, creating a particle-free environment. The G-cell features built-in damping and over-range stops to protect it from mechanical shock. MMAS40G accelerometers are ideally suited for automotive crash detection and recording, vibration monitoring, automotive suspension control, appliance control systems, etc. Features * Minimum Full Scale Measurement 40g * Calibrated, True Self-Test * Standard 16-Pin Plastic DIP package * Senses Perpendicular to the Printed Circuit Board * Integral Signal Conditioning and 4-Pole Filter * Linear Output * Robust, High Shock Survivability
1 2 3 4 5 6
MMAS40G10D
MICROMACHINED ACCELEROMETER 40g
10 9 12 11 14 13 16 15
78 56 34 12
DIP PACKAGE CASE 648C-03
PIN NUMBER (DIP)
N/C (1) N/C (1) N/C (1) Self-Test Output Bypass (2) GND VS (2) 9 10 11 12 13 14 15 16 N/C (1) N/C (1) N/C (1) N/C (1) N/C (1) N/C (1) N/C (1) N/C (1)
SIMPLIFIED BLOCK DIAGRAM
+ + 8 + VS
7 8
4
SELF-TEST
g
G-CELL
A 6 BYPASS
NOTES: 1. Internal connections. All N/C should be tied to gnd, except pin 11 which must be tied to pin 8. 2. Bypass to ground with 0.1 F ceramic capacitor for specified system performance.
LOW-PASS FILTER
TEMPERATURE COMPENSATION
5
OUTPUT
7
GND
REV 1
Motorola Sensor Device Data (c) Motorola, Inc. 1997
1
MMAS40G10D
MAXIMUM RATINGS
Rating Acceleration (biased each axis) Acceleration (unbiased each axis) Supply Voltage Storage Temperature Operating Temperature(6) Symbol G G VSmax Tstg TA Value 500 2000 -0.3 to +7.0 - 40 to +105 - 40 to +85 Unit g g Vdc C C
OPERATING CHARACTERISTICS (VS = 5.0 Vdc, TA = 25C unless otherwise noted)
Characteristic Acceleration Range Output Drive Capability Supply Voltage Supply Current Full Scale Output Range Sensitivity (over temperature range) (2) (3) Zero Acceleration Output (over temperature range) (3) (4) Linearity Transverse Sensitivity Frequency Bandwidth Noise Self-Test Output Equivalent (5) Self-Test Input Low Self-Test Input High Self-Test Input Current Symbol G -- VS IO VFSO V/G Voff -- -- -- -- GS VSTL VSTH -- Min 40 - 0.2 4.75 -- 0.3 36 2.2 -- -- 300 -- 20 -- 3.4 10 Typ 55 -- 5.0 5.0 -- 40 2.5 0.5 1.0 400 15 25 -- -- 70 Max -- 0.2 5.25 7.0 VS - 0.3 44 2.8 2.0 3.0 500 25 30 1.6 -- 200 Unit g mA V mA V mV/g V %FSO %FSO Hz mVpk g V V A
NOTES: 1. The output voltage increases from the Zero Acceleration Output for positive acceleration and decreases for negative acceleration. The typical sensitivity is 40 mV/g. For example, with VS = 5.0 V, a + 20g input will result in a 3.3 V output. (Voutput = 2.5 + 0.040 x 20) and a - 20g input will result in a 1.7 V output. 2. Sensitivity is a ratiometric parameter: V/G(Vs) = V/G(5 V) x (VS / 5 V). 3. The compensated temperature operating range is - 40 to +85C. 4. Zero Acceleration Output is a ratiometric parameter: Voff(Vs) = Voff(5 V) x (VS / 5 V). 5. Equivalent output in response to a Logic Level One on the self-test pin. 6. Additional temperature range available. Consult factory.
ORDERING INFORMATION
Device MMAS40G10D Temperature Range -40 to +85C Case No. Case 648C-03 Package Plastic DIP
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Motorola Sensor Device Data
MMAS40G10D
POSITIVE ACCELERATION SENSING DIRECTION
16
9
1
8
*
DIP PACKAGE
* When positioned as shown, gravity will result in a positive 1g output
Motorola reserves the right to make changes without further notice to any products herein. Motorola makes no warranty, representation or guarantee regarding the suitability of its products for any particular purpose, nor does Motorola assume any liability arising out of the application or use of any product or circuit, and specifically disclaims any and all liability, including without limitation consequential or incidental damages. "Typical" parameters which may be provided in Motorola data sheets and/or specifications can and do vary in different applications and actual performance may vary over time. All operating parameters, including "Typicals" must be validated for each customer application by customer's technical experts. Motorola does not convey any license under its patent rights nor the rights of others. Motorola products are not designed, intended, or authorized for use as components in systems intended for surgical implant into the body, or other applications intended to support or sustain life, or for any other application in which the failure of the Motorola product could create a situation where personal injury or death may occur. Should Buyer purchase or use Motorola products for any such unintended or unauthorized application, Buyer shall indemnify and hold Motorola and its officers, employees, subsidiaries, affiliates, and distributors harmless against all claims, costs, damages, and expenses, and reasonable attorney fees arising out of, directly or indirectly, any claim of personal injury or death associated with such unintended or unauthorized use, even if such claim alleges that Motorola was negligent regarding the design or manufacture of the part. Motorola and are registered trademarks of Motorola, Inc. Motorola, Inc. is an Equal Opportunity/Affirmative Action Employer.
Motorola Sensor Device Data
3
MMAS40G10D
PACKAGE DIMENSIONS
-A-
16 9
-B-
1 8
L
NOTES: 1. DIMENSIONING AND TOLERANCING PER ANSI Y14.5M, 1982. 2. CONTROLLING DIMENSION: INCH. 3. DIMENSION L TO CENTER OF LEADS WHEN FORMED PARALLEL. 4. DIMENSION B DOES NOT INCLUDE MOLD FLASH. 5. INTERNAL LEAD CONNECTION BETWEEN 4 AND 5, 12 AND 13.
NOTE 5 DIM A B C D E F G J K L M N
C -T-
SEATING PLANE
N F E G D 16 PL 0.13 (0.005)
M
M K J
16 PL M
0.13 (0.005) TA
S
TB
S
INCHES MIN MAX 0.740 0.840 0.240 0.260 0.145 0.185 0.015 0.021 0.050 BSC 0.040 0.70 0.100 BSC 0.008 0.015 0.115 0.135 0.300 BSC 0_ 10_ 0.015 0.040
MILLIMETERS MIN MAX 18.80 21.34 6.10 6.60 3.69 4.69 0.38 0.53 1.27 BSC 1.02 1.78 2.54 BSC 0.20 0.38 2.92 3.43 7.62 BSC 0_ 10_ 0.39 1.01
CASE 648C-03 ISSUE C DIP PACKAGE
Mfax is a trademark of Motorola, Inc. How to reach us: USA / EUROPE / Locations Not Listed: Motorola Literature Distribution; P.O. Box 5405, Denver, Colorado 80217. 303-675-2140 or 1-800-441-2447 JAPAN: Nippon Motorola Ltd.; Tatsumi-SPD-JLDC, 6F Seibu-Butsuryu-Center, 3-14-2 Tatsumi Koto-Ku, Tokyo 135, Japan. 81-3-3521-8315
MfaxTM: RMFAX0@email.sps.mot.com - TOUCHTONE 602-244-6609 ASIA/PACIFIC: Motorola Semiconductors H.K. Ltd.; 8B Tai Ping Industrial Park, - US & Canada ONLY 1-800-774-1848 51 Ting Kok Road, Tai Po, N.T., Hong Kong. 852-26629298 INTERNET: http://motorola.com/sps
4
MMAS40G10D/D Motorola Sensor Device Data


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